SmarFlex® Scanner with Flexure Joints

SmarFlex® nanopositioning scanner stages use the advantages of piezo-driven mechanical flexures to realize highly precise positioning tasks up to several 100 μm. For scanning applications such as AFM, SmarFlex® scanning stages feature maximum scanning speed and minimum scanning error. Also in the field of optical microscopy, focal points can be set accuratly, mirrors can be tilted very precisely or optical fibers can be coupled.